Application and Features:
Spec - Model: MLF6/MLF8/MLF12/MLF15
Substrate thickness: 0.02-3.5mm
Resolution: 6/8/12/15 (different model, e.g MLF6 is 6um resolution
Depth of focus: ±40/±80/±150/±200um
Overlay: ±1/±3/±4/±5um
Wavelength: 405/375nm LD source
UPH: 20/40/80/100@12"
 
Application:
Ceramic substrate or package/ 3rd generation semiconductor litho/ PCB/ Barcode or ID exposure
 
Features
Maskless
High TP for Mass Production 
EFEM support (optional)