Application：
Si and Thinfilms
8/12 EFEM with 2 loading port or 6/8 SMIF or 6/8 open cassette
 
Throughput @60nm sensitivity:
40 WPH for 8 inch
20 WPH for 12 inch
 
Throughput @80nm sensivity: 
100 WPH for 8 inch
50 WPH for 12 inch