Application:
Si and Thinfilms
- 8/12 EFEM with 2 loading port or 6/8 SMIF or 6/8 open cassette
Throughput @60nm sensitivity:
- 40 WPH for 8 inch
- 20 WPH for 12 inch
Throughput @80nm sensivity:
- 100 WPH for 8 inch
- 50 WPH for 12 inch
IC mMG/PG, F, H Series Measurement Equipment
Request for Quotation