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Application:

Si and Thinfilms

  • 8/12 EFEM with 2 loading port or 6/8 SMIF or 6/8 open cassette

 

Throughput @60nm sensitivity:

  • 40 WPH for 8 inch
  • 20 WPH for 12 inch

 

Throughput @80nm sensivity: 

  • 100 WPH for 8 inch
  • 50 WPH for 12 inch

IC mMG/PG, F, H Series Measurement Equipment

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