Part No.: CR450-01-C001-PC (With retainer)
                   CR450A-01-C002-PC (Without retainer)
Capacity: 25(ø450mm wafer)
Dimension: 520mm x 402mm x 482mm
Pocket pitch: 12mm
Pocket flat: 4mm
 
SEMI Standard compliant (E158).
Selected material is superior in rigidity and low outgassing.
Wash slots in sidewalls to improve cleaning, draining and drying effect.
Retainer (Wafer creep-out prevention) with lock mechanism is detachable.
Kinematic coupling is detachable (Optional).