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Overhaul

Used Equipment

  • Nikon Stepper：G6／G7／i7／i8／i9／i10／i11

  • Canon Stepper : i4 / i5 / i5+

  • TEL Track：MK-VZ／MK-7／MK-8

  • Hitachi CDSEM：S88xx／S92xx

  • CND Plus Coater/Developer

  • ASSI Spin Rinse Dryer

Refurbishment

  • AE & MAE & MKS RPS (Remote Plasma Source)

  • AMAT EPD (Verity Eye D) Controller, Model : SD1024D-2-S / SD2048DL

  • DAIHEN & MKS Magnetron Head

  • Turbo pump & Dry pump & TES Robot / Controller

  • NSK & KollMorgen Motor / Driver

Parts

  • Diffuser / Bulk Filter / Gas Filter / Gasket Filter OEM

  • SiC / Quartz / Ceramic / Glass / Aluminum related tray, fork, carrier⋯⋯

  • Equipment parts ( e.g.: Motor, valve, Sensor, PCB, Driver, Power supply... )

  • Mercury Lamp for Lithus / Lithus Pro / Lithus Pro V / Lithus Pro Z / ACT-8 / ACT-12 / MK8

  • Mercury Lamp for Ultratech AT-300W / KLA-2367 / Nano 8000 & 9100 / DNS SK2000 & RF3S

  • Customized Mercury Lamp

  • TC Wafer and Thermocouple

  • KALREZ O-ring for TEL & DNS 300mm furnace

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