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Intelligent Manufacturing

AI Solutions for Intelligent Manufacturing

  • AI Images Platform

  • Wafer Level Automatic Optical Inspection and Measurement Equipment

  • Optical Microsope Intelligent Automation Upgrade

  • Automatic Embedded Optical Inspection System

Zi Lian provides highly integrated intelligent image services that can support all image inspection equipment. Training mode allows offline server processing, or integration with testing equipment for online processing. In addition to further improvement of the equipment testing accuracy, it also enables product quality to enter a perfection cycle through self-learning mode.​​​

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This product contains five main parts:

1. Image and data input module

  • Perform image query and transmission with various AOI

2. Mounted AI module

  • Provide AI offline mode for AI model field verification

  • Provide AI online mode for AI real-time operation inference

  • Users can train and deploy the models through UI without any extra coding

3. Marker drawing module

  • Provide a marker drawing function based on AI module output

4. Image and data output module

  • SINF and KLARF files are available base on AI models output data

5. AI Big Data Database

  • AI operation results allow data collection and storage based on output fields

  • Provide remote database

  • Provide combination and analysis of multiple AI results

Wafer Level Automatic Optical Inspection and Measurement Equipment

The world’s first automatic optical microscope inspection equipment offers fully automatic macroscopic and microscopic inspection and measurement, satisfy wafer front-side and back-side inspection, and no longer traditionally manual operation with identification through human eyes. Zi Lian has been certified by a number of advanced OSAT packaging plants. Our system supports online ASI, ACI, ADI, AEI, APDI, API, and ASTI testing and measurement and offline analysis.

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Equipment capability

  1. It is used to inspect “8 and 12” (200mm/300mm) wafers.

  2. Wafer warpage handling capability is +/-7mm.

  3. Macro inspection “zero” blind spot to detect defects on the front-side and back-side of wafer.

  4. Microscopic inspection offers multiple magnifications. 6 magnifications are available: 2X, 5X, 10X, 20X, 50X and 100X, with resolution range 0.055um ~ 2.75um.

  5. Bump CD/line width/overlap/EBR/WEE measurement stability is within 1 pixel deviation.

  6. Multi-function settings to meet all quality assurance specifications.

  7. Online and offline software review

  8. The inspection results output in KLARF or SINF files according to specifications, including the coordinate information of the front-side of the wafer corresponding to the back-side defects.

  9. FAB automation support (OHT + SECS/GEM)

  10. Intelligent AI ADC software

Zi Lian Wafer Level Automatic Optical Inspection and Measurement Equipment

Optical Microsope Intelligent Automation Upgrade

Through the fully automatic optical inspection program, all inspections can be standardized and tracked to improve quality management. This is one of the necessary conditions to realize unmanned factory and Industry 4.0.

 

Program capability

  1. It can be equipped with integrated and upgraded brands and models: Nikon OST3100/3200 and Olympus Al3300/3320.

  2. Macroscopic automatic picture-taking provides wafer images for offline defect review.

  3. Microscopic automatic picture-taking provides wafer images for offline defect review.

  4. Microscopic automatic measurement Bump CD/line width/overlap/EBR/WEE measurement stability is within 1 pixel deviation.

  5. Multi-function settings to meet all quality assurance specifications.

  6. Online and offline software review

  7. FAB automation support (OHT + SECS/GEM)

  8. Intelligent AI ADC software

Automatic Embedded Optical Inspection System

System capability

  1. Can be equipped with various process equipments.

  2. Automatically detect defects.

  3. Optimized integration of customized evaluation system and peripherals.

  4. Online and offline software review.

  5. Multi-function settings to meet all quality assurance specifications.

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