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Probe Measurement (RS & Leakage)
Features
  • Auto RS & Leakage measurement
  • Wafer Size：200/300 mm
  • Fully Automation (Auto load & auto measurement & data upload)
  • Semi Automation (Manual load & auto measurement & data upload)
  • Support SECS /GEM200 or GEM300
  • Support OHT/AGV
  • Auto tip clean/ Auto tip teaching
  • Integrated KEYSIGHT/KEITHLEY/Other Brand Meter
  • Support Ultra-Thin & high warpage wafer
  • ESD protection

Probe Measurement (RS & Leakage)

SKU: ZL013028
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