Features
Wafer Size：4~6”/6~8”/8~12” 
Packing, Unpacking, sorting. 
Pre-Aligner for Wafer notch & Flat, Wafer ID reader 
Auto detect Wafer / Interleaf / Foam/Ring "
Carriers compatibility : SEMI Standard 
-300 mm: 25 slots FOUP / FOSB(manual & auto door) / 25 wafers HWS 
-200 mm: 25 slots Open Cassette / 25 wafers HWS/Jar" "
-150 mm: 25 slots Open Cassette / 25 wafers HWS/Jar 
-100 mm: 25 slots Open Cassette / Jar" 
ESD protection