Features
Metal Frame Size: 8” / 12’
Up to 4 load port
Support Metal Cassette
Customized Robot Type
Auto Mapping function
Support SECS / GEM200 or GEM300
Sorter Function: dismantle、merge、random、rearrangement
Wafer ID/Frame ID reader 
Support Frame ID barcode/QR Code read
Metal cassette Stop lever detection with interlock