Features
Packing, Unpacking, Sorting
Supports Fully Automated Operation
Automatic Sliding HWS LP Drawer
Deep LP drawer for tall (ring separators) HWS
Retractable HWS LP Drawer
Auto HWS lid removal/replacement
E-84 PIO sensors for HWS AGV transfer and FOUP AGV/OHT transfer
Class 1 (0.1µ) environment
Complete management of HWS media
Wafer ring separator - bulk transfer mode
Supports "ballroom" or "through wall - bay/chaise" fab layouts
CE, NFPA79, SEMIF47, S2, S8 3rd party certified
SECS/GEM300 Compliant