Features
Fully Automated 300mm Wafer packing,unpacking and sorting
SEMI S2/S8 Compliant- 3rd party certification
SEMI SECSGEM300 Host Compliant
Rorze RR756 robot with compliance, flip module and multi chamber      wafer handling end effector
2-Rorze RV-201 Linear FOUP/FOSB LP with RFID
E84 FOUP/FOSB Transfer to RV201 LP
Single Stocker with 1- RV-201 LP and light curtain configured for              proprietary HWS Carrier
Automated HWS lid removal/replacement
Automated HWS transfer stage
Bulk and singulated transfer of HWR300 wafer ring separators from        Entegris HWS300C
Baumer Camera detection of packing media
ISO Class 7 at 0.5 micron Mini Environment
Run Rate: Single HVWS - 125 WPH Minimum
Footprint: 1526mm D x 2636mm W