Features
Provide fully auto semiconductor equipment integration service, can be used with different wafer sizes .
Provide 300 / 200 / 150 mm EFEM for process equipment ; measurement system and inspection system integration. Or customized design according to the specific requirements
Provide SECS / GEM200 or GEM300 by option .
Provide high flexibility, high cleanliness, high UPH EFEM equipment.
Capable for OHT / AGV automation system.
ESD protection