Semi Standard compliant. (E47.1, E1.9, E15.1, E57, E62)
Basic design for superior low particle feneration, sealability and cleaning and drying performance.
High density structure for enchanced interoperability.
Selected material taking low outgassing and low water absorption into account.
Conductive path from water support to robot flange and kinematic grooves for ESD safe.
 
Option
1) UV measures
2) Carrier ID (RF-ID)
3) Info Pad (A, B, C, D)
4) Card Holder
5) N2 valve