Application and Features
SPEC  - Model: PLP3000
substrate size: 600x600mm
substrate thickness: 0.1-5mm
Warpage Handling: ±10mm
Resolution: 3um
Overlay: ±2um
CDU：±10%
Laser wavelength：375/405nm 
UPH: 20prints/H@ 600x600mm
Application
FC CSP, FC BGA, PLP- FI, FO, 2.5D
 
Features
Maskless 
warpaged panel handling
EFEM support
Auto Focus