Application and Features
SPEC  - Model: MLC600
Substrate size: 200mm
Substrate thickness: 0.02-4mm
Resolution: 0.6um(mini Feature)
Overlay: ±0.5um
CDU：±10%
Laser wavelength：375/405nm 
UPH: 300mm²/min @ 0.6um, 1000mm²/min
Application
Micro-nano device，MEMS
 
Features
A small dimension，compact lithography tool for universities，labs or research institution.
Maskless 
Auto Focus
Automatic Alignment
Visual exposure function
Irregular sample exposure