Features:
Wafer Size：150/200/300 mm
Fully automation / Manual load with auto measurement Pre-aligner for 150/200/300mm (option)
RFID reader (option)
Support OHT/AGV/SECS GEM200 or SECS GEM300
Resistance Measure by KEITHLEY/HIOKO Meter
Data display by 2D/3D Map in software and report upload
ESD protection
Capable for Ti , Cu , Ag, Au, Tiw, Ni, Al, ZrN, TaN, ITO …various metal film