Features
Wafer Size: 8” -12”
Wafer Pre-aligner for 8”/12”
RFID reader (option)
Available for defect review, EBR, Bevel and edge inspection Nikon Microscope
Available for CD, EBR, Overlay auto measurement
System+ macro visual inspection
Capable warpage wafer and Thin wafer handling*Available for OHT/AGV/SECS GEM200 or GEM300
Auto focus and motorized stage & Bright field/Dark-field
ESD protection