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Capacit: 15

Dimension: 332mm  x 310mm x 200mm

Pocket pitch: 10mm

Compatible box: BX300-01PC

Compatible Handle CH300-01

Material: Polyethersulfone

 

SEMI Standard compliant. (E1.9,E57)

Adopted the material superior in high dimensional accuracy, rigidity, low outgassing, low abrasion, heat resistance.

Dedicated handle CH300-01 attachable.

300mm Wafer Open Cassette

SKU: ZL170263
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